Vacuum Rotary Union Joint

A Vacuum Rotary Union Joint is a key device used to achieve a sealed connection between a stationary part and a rotating part in a vacuum system. It can maintain good airtightness in a high vacuum or ultra-high vacuum environment, allowing the shaft or workpiece to rotate in a vacuum chamber.
 

High vacuum sealing performance

The vacuum rotary joint adopts a high-precision mechanical seal structure, and the sealing leakage rate can be controlled at 1×10⁻⁹ Pa·m³/s. Compared with the 1×10⁻⁷ Pa·m³/s standard commonly used in the industry, its sealing performance has been improved by two orders of magnitude. This sealing ability ensures that the joint can still operate stably in a vacuum environment of 10⁻⁶ Pa or higher, effectively reducing the risk of external gas infiltration into the system, extending the equipment operation cycle, and reducing the maintenance frequency.

Good mechanical durability

The rotary joint uses high-speed steel bearings inside, which have good wear resistance. Under experimental conditions, the continuous operation life of this type of bearing used in a vacuum rotary union joint can reach 10,000 hours, more than twice that of ordinary bearings. Friction loss is fully considered in the design-by optimizing the contact surface and lubrication structure, it maintains stable operation at 1,500 rpm, making it suitable for continuous high-load working environments.

Reasonable thermal expansion control

The sealing element uses materials with a thermal expansion coefficient of less than 5×10⁻⁶ /°C, and the structural deformation rate is small in an environment with drastic temperature changes. This feature ensures that the sealing state is not easily affected by thermal stress within the operating temperature range of -40℃ to +150℃, thereby ensuring the long-term stability of the sealed connection. This performance is particularly important for equipment that needs to be used in hot and cold alternating and high-temperature vacuum systems.

Wide range of applications

The rotary joint can work stably in the medium pressure range from vacuum negative pressure to 0.6 MPa positive pressure, covering a variety of industrial application needs. Its application areas for a vacuum rotary union joint include semiconductor equipment, vacuum coating systems, biopharmaceuticals, and scientific research experimental equipment. While meeting standard product supply, we also offer customized solutions for non-standard sizes, materials, and interface forms based on specific user environments to enhance adaptability and system compatibility.